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Proceedings Paper

A fast model-order reduction algorithm for microelectromechanical devices
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Paper Abstract

A fast model-order reduction algorithm is proposed for microelectromechanical devices. By breaking the system matrices obtained from FEM methods down into smaller ones, the proposed algorithm will reduce computational cost and memory requirements required by the inversion operation of the system matrix. As an example, experimental studies are presented for a linear-drive multiple-mode resonator demonstrating that predicted results are in very good agreement with results from previous publications.

Paper Details

Date Published: 19 January 2007
PDF: 9 pages
Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630P (19 January 2007); doi: 10.1117/12.709023
Show Author Affiliations
Rumi Zhang, Univ. of Calgary (Canada)
Peiyu Zhang, Univ. of Calgary (Canada)
Graham A. Jullien, Univ. of Calgary (Canada)


Published in SPIE Proceedings Vol. 6463:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
Allyson L. Hartzell; Rajeshuni Ramesham, Editor(s)

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