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Proceedings Paper

Two-dimensional diffractive optical element based fabrication of 3D photonic crystal templates
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Paper Abstract

Recently, two-dimensional and three-dimensional periodic dielectric structures have been directly fabricated by laser holographic lithography to create novel geometric structures with high-precision tolerances. Multiple beam interference via beam splitting mirrors or diffractive optical elements produce iso-intensity contours that can be accurately recorded in photoresist and subsequently used as a template for creating photonic crystals with a complete or partial bandgap. We demonstrate single laser exposure method of forming three-dimensional photonic crystal templates in photoresist with multi-layer two-dimensional diffractive optical elements. Several photonic stopbands are identified in the near-infrared spectrum along multiple crystallographic directions.

Paper Details

Date Published: 6 February 2007
PDF: 5 pages
Proc. SPIE 6480, Photonic Crystal Materials and Devices VI, 64800Q (6 February 2007); doi: 10.1117/12.708603
Show Author Affiliations
Debashis Chanda, Univ. of Toronto (Canada)
Peter R. Herman, Univ. of Toronto (Canada)


Published in SPIE Proceedings Vol. 6480:
Photonic Crystal Materials and Devices VI
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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