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Proceedings Paper

MEMS reliability assessment program: progress to date
Author(s): J. L. Zunino; D. R. Skelton
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Paper Abstract

As the Army transforms into a more lethal, lighter and agile force, the technologies that support these systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the Army and Department of Defense will rely on heavily to achieve these objectives. Current and future military applications of MEMS devices include safety and arming devices, fuzing devices, various guidance systems, sensors/detectors, inertial measurement units, tracking devices, radio frequency devices, wireless RFIDs and network systems, GPSs, radar systems, mobile base systems, satellites, missiles and the like.

Paper Details

Date Published: 19 January 2007
PDF: 10 pages
Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630D (19 January 2007); doi: 10.1117/12.708242
Show Author Affiliations
J. L. Zunino, U.S. Army RDE Command (United States)
D. R. Skelton, U.S. Army RDE Command (United States)


Published in SPIE Proceedings Vol. 6463:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
Allyson L. Hartzell; Rajeshuni Ramesham, Editor(s)

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