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Proceedings Paper

Novel modeling approach for multi-disciplinary micro domains
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Paper Abstract

In the analysis and modeling of MEMS devices, a general finite element formulation is necessary to solve a multidisciplinary domain of the device with large number of nodes and elements. In this paper, we present a step by step finite element formulation for automated modeling of multi-disciplinary domains. The electro-thermo-mechanical domain is explained and an algorithmic approach for sequential analysis of an arbitrary ground structure with multi-disciplinary boundaries is developed and implemented in Matlab with a graphical user interface. The results of the finite element approach is compared and verified with exact solutions and test results from literature. The agreement of results verifies the application of proposed finite element formulation to the analysis of elector-thermo-mechanical domains. This formulation provides a fast and reliable tool to analyze electro-thermo-elastic devices which allows large flexibility in the selection of mechanical and electrical boundary conditions.

Paper Details

Date Published: 22 January 2007
PDF: 10 pages
Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660S (22 January 2007); doi: 10.1117/12.707826
Show Author Affiliations
Mehrnaz Motiee, Univ. of Waterloo (Canada)
Amir Khajepour, Univ. of Waterloo (Canada)
Raafat R. Mansour, Univ. of Waterloo (Canada)

Published in SPIE Proceedings Vol. 6466:
MOEMS and Miniaturized Systems VI
David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk, Editor(s)

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