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Proceedings Paper

Singlet oxygen generator on a chip for MEMS-based COIL
Author(s): Carol Livermore; Tyrone F. Hill; Luis Velásquez-García; Benjamin A. Wilhite; Alan H. Epstein; Klavs Jensen; W. Terry Rawlins; Seonkyung Lee; Steven Davis
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Paper Abstract

Microelectromechanical systems (MEMS) offer a promising approach for creating compact, efficient chemical oxygen iodine lasers. In this paper we report the demonstration and characterization of a chip-scale, MEMS-based singlet oxygen generator, or microSOG. The microSOG is a batch-fabricated silicon chip that is micromachined to form reactant inlets and distribution system, an array of microstructured packed bed reaction channels to ensure good mixing between the BHP and the chlorine, a gas-liquid separator that removes liquid from the output stream by capillary effects, integrated heat exchangers to remove the excess heat of reaction, and product outlets. The microSOG has successfully generated singlet delta oxygen, and the resulting singlet delta concentrations were measured in a quartz test cell downstream of the chip using absolutely-calibrated near-infrared emission measurements made by an InGaAs array spectrometer. A kinetics analysis was used to determine the concentration at the chip's outlet from the concentration at the measurement point. Singlet delta yield at the outlet was determined to be about 81% at 150 Torr plenum pressure with a 25 sccm flow of chlorine. The corresponding output flow carries about 1.4 W of power at the chip's outlet.

Paper Details

Date Published: 14 February 2007
PDF: 9 pages
Proc. SPIE 6454, High Energy/Average Power Lasers and Intense Beam Applications, 64540G (14 February 2007); doi: 10.1117/12.707205
Show Author Affiliations
Carol Livermore, Massachusetts Institute of Technology (United States)
Tyrone F. Hill, Massachusetts Institute of Technology (United States)
Luis Velásquez-García, Massachusetts Institute of Technology (United States)
Benjamin A. Wilhite, Univ. of Connecticut (United States)
Alan H. Epstein, Massachusetts Institute of Technology (United States)
Klavs Jensen, Massachusetts Institute of Technology (United States)
W. Terry Rawlins, Physical Sciences Inc. (United States)
Seonkyung Lee, Physical Sciences Inc. (United States)
Steven Davis, Physical Sciences Inc. (United States)

Published in SPIE Proceedings Vol. 6454:
High Energy/Average Power Lasers and Intense Beam Applications
Steven J. Davis; Michael C. Heaven; J. Thomas Schriempf, Editor(s)

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