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Proceedings Paper

MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and OCT imaging instruments
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Paper Abstract

This paper explores the use of deformable membrane mirrors for primary focus control and spherical aberration correction in confocal microscopes and optical coherence tomography instruments that are miniaturized for in situ imaging. System requirements for membrane performance are explored for both high and low numerical aperture regimes. Examples of both confocal imaging and focus-tracking optical coherence tomography using vari-focus silicon nitride MEMS mirrors are presented. It is envisioned that future instruments with enhanced-stroke adaptive membrane mirrors will provide high fidelity microscopy and optical coherence tomography for diagnostic imaging of intact, living tissue.

Paper Details

Date Published: 9 February 2007
PDF: 13 pages
Proc. SPIE 6467, MEMS Adaptive Optics, 646707 (9 February 2007); doi: 10.1117/12.706699
Show Author Affiliations
David L. Dickensheets, Montana State Univ./Bozeman (United States)


Published in SPIE Proceedings Vol. 6467:
MEMS Adaptive Optics
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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