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Proceedings Paper

Advances in fully CMOS integrated photonic devices
Author(s): Jurgen Michel; J. F. Liu; D. H. Ahn; D. Sparacin; R. Sun; C. Y. Hong; W. P. Giziewicz; M. Beals; L. C. Kimerling; A. Kopa; A. B. Apsel; M. S. Rasras; D. M. Gill; S. S. Patel; K. Y. Tu; Y. K. Chen; A. E. White; A. Pomerene; D. Carothers; M. J. Grove
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Paper Abstract

The complete integration of photonic devices into a CMOS process flow will enable low cost photonic functionality within electronic circuits. BAE Systems, Lucent Technologies, Massachusetts Institute of Technology, Cornell University, and Applied Wave Research are participating in a high payoff research and development program for the Microsystems Technology Office (MTO) of DARPA. The goal of the program is the development of technologies and design tools necessary to fabricate an application specific, electronic-photonic integrated circuit (AS-EPIC). The first phase of the program was dedicated to photonics device designs, CMOS process flow integration, and basic electronic functionality. We will present the latest results on the performance of waveguide integrated detectors, and tunable optical filters.

Paper Details

Date Published: 9 February 2007
PDF: 11 pages
Proc. SPIE 6477, Silicon Photonics II, 64770P (9 February 2007); doi: 10.1117/12.706586
Show Author Affiliations
Jurgen Michel, Massachusetts Institute of Technology (United States)
J. F. Liu, Massachusetts Institute of Technology (United States)
D. H. Ahn, Massachusetts Institute of Technology (United States)
D. Sparacin, Massachusetts Institute of Technology (United States)
R. Sun, Massachusetts Institute of Technology (United States)
C. Y. Hong, Massachusetts Institute of Technology (United States)
W. P. Giziewicz, Massachusetts Institute of Technology (United States)
M. Beals, Massachusetts Institute of Technology (United States)
L. C. Kimerling, Massachusetts Institute of Technology (United States)
A. Kopa, Cornell Univ. (United States)
A. B. Apsel, Cornell Univ. (United States)
M. S. Rasras, Lucent Technologies Bell Labs. (United States)
D. M. Gill, Lucent Technologies Bell Labs. (United States)
S. S. Patel, Lucent Technologies Bell Labs. (United States)
K. Y. Tu, Lucent Technologies Bell Labs. (United States)
Y. K. Chen, Lucent Technologies Bell Labs. (United States)
A. E. White, Lucent Technologies Bell Labs. (United States)
A. Pomerene, BAE Systems (United States)
D. Carothers, BAE Systems (United States)
M. J. Grove, BAE Systems (United States)


Published in SPIE Proceedings Vol. 6477:
Silicon Photonics II
Joel A. Kubby; Graham T. Reed, Editor(s)

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