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Proceedings Paper

MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films
Author(s): Jong H. Han; Jagannathan Rajagopalan; M. Taher A. Saif
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Paper Abstract

We have developed a MEMS-based testing stage that can quantitatively characterize both the electrical and mechanical properties of nanocrystalline metal films. This stage, which is SEM and TEM compatible, is a modified version of an earlier MEMS-based tensile testing stage (M. A. Haque and M. T. A. Saif, Proc. Natl. Acad. Sci., 101(17), 6335-6340 (2004)). This modified stage requires a simpler fabrication procedure, involving fewer lithography and etching steps, and has higher yield compared to the earlier version. It allows for 4-point electrical resistivity measurement, and in-situ tensile testing in SEM and TEM of free-standing nano-scale metal films. The stage was used to perform a tensile test on a 100-nm-thick aluminum film and electrical resistivity measurement on a 110-nm-thick aluminum film, the results of which are described.

Paper Details

Date Published: 12 February 2007
PDF: 8 pages
Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640C (12 February 2007); doi: 10.1117/12.706115
Show Author Affiliations
Jong H. Han, Univ. of Illinois at Urbana-Champaign (United States)
Jagannathan Rajagopalan, Univ. of Illinois at Urbana-Champaign (United States)
M. Taher A. Saif, Univ. of Illinois at Urbana-Champaign (United States)


Published in SPIE Proceedings Vol. 6464:
MEMS/MOEMS Components and Their Applications IV
Srinivas A. Tadigadapa; Reza Ghodssi; Albert K. Henning, Editor(s)

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