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Process development, design, and characterization of high-finesse micromachined optical Fabry-Perot microcavities
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Paper Abstract

Micromachined waveguide Fabry-Perot cavities are demonstrated. The devices are fabricated in silicon-on-insulator using a cryogenic dry-etch process, enabling large aspect ratios with high verticality and low surface roughness (⩽10 nm). Details of the process development are presented with emphasis on our specific device application. The Fabry-Perot cavities consist of shallow-etched rib waveguides and deep-etched silicon/air distributed Bragg reflector (DBR) mirrors. The high-index-contrast mirrors enable large reflectance with only a few mirror periods. High Q-factor (Q≈27,000) and large finesse (F≈500) were measured. We demonstrate thermo-optic tuning over &Dgr;&lgr;=6.7 nm and also examine modulation of the cavity (f=150 kHz). Future improvements and application areas of this device are discussed.

Paper Details

Date Published: 12 February 2007
PDF: 10 pages
Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640N (12 February 2007); doi: 10.1117/12.705901
Show Author Affiliations
Marcel W. Pruessner, Naval Research Lab. (United States)
Todd H. Stievater, Naval Research Lab. (United States)
William S. Rabinovich, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 6464:
MEMS/MOEMS Components and Their Applications IV
Srinivas A. Tadigadapa; Reza Ghodssi; Albert K. Henning, Editor(s)

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