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Proceedings Paper

Soft-lithographic replication of 3D polymeric microstructures created with MAP
Author(s): Christopher N. LaFratta; Linjie Li; John T. Fourkas
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Paper Abstract

Considerable effort has gone into the development of techniques for three-dimensional fabrication. A particularly promising class of techniques for creating 3D structures relies upon the use of multiphoton absorption. In multiphoton absorption polymerization (MAP), 3D structures are created on a point-by-point basis by hardening a prepolymer resin with a tightly focused laser beam. While MAP offers the capability of creating arbitrarily complex 3D structures with feature sizes on the order of 100 nm, it is inherently a serial technique. In order to scale this technique up for mass production of microstructures, it will be necessary to develop a means for parallelizing the creation of structures on the wafer scale. One promising avenue for attaining this goal is the use of soft lithography, in the form of microtransfer molding (&mgr;TM). However, in the past &mgr;TM has been limited to the reproduction of "2.5D" structures, i.e. those without closed loops. We have developed a new technique called membrane-assisted microtransfer molding (MA-&mgr;TM) that can circumvent the closed-loop issue, allowing for the replication of truly 3D structures.

Paper Details

Date Published: 7 March 2007
PDF: 9 pages
Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 646210 (7 March 2007); doi: 10.1117/12.704607
Show Author Affiliations
Christopher N. LaFratta, Univ. of Maryland, College Park (United States)
Linjie Li, Univ. of Maryland, College Park (United States)
John T. Fourkas, Univ. of Maryland, College Park (United States)


Published in SPIE Proceedings Vol. 6462:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary-Ann Maher; Harold D. Stewart; Jung-Chih Chiao; Thomas J. Suleski; Eric G. Johnson; Gregory P. Nordin, Editor(s)

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