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Proceedings Paper

LVD micromirror for rapid reference scanning in optical coherence tomography
Author(s): Xiaoxing Feng; Ankur Jain; Sagnik Pal; Lei Xiao; Toshikazu Nishida; Huikai Xie
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Paper Abstract

A translationally-scanning mirror is always desired for the axial scanning in optical coherence tomography (OCT), but conventional scanners are bulky and have relatively slow scanning speed. This paper reports a micromirror that has the potential to achieve both the scanning speed and range required by OCT. The large piston motion of the micromirror is obtained using a large-vertical-displacement (LVD) microactuator. The device is fabricated using a deep-reactive-ion-etch (DRIE) CMOS-MEMS process. A pair of electrothermal bimorph actuators is employed to achieve tilt-free mirror plate and large piston motion. A linear voltage divider with a voltage ratio of 1:2.3 between the two electrothermal actuators has been used to obtain static displacements up to 200 &mgr;m. The frequency response of this device was obtained using a laser Doppler vibrometer, and resonant peaks were observed at 1.18 and 2.62 kHz. AC signals at 50 Hz with a voltage ratio of 1:1.2 were supplied to the actuators, and the maximum dynamic piston motion was measured to be 26 &mgr;m. The decreasing amplitude over increasing frequency was caused by the heat-sink effect of the mirror plate. A phase delay between the two actuators was also observed.

Paper Details

Date Published: 12 February 2007
PDF: 9 pages
Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640M (12 February 2007); doi: 10.1117/12.703221
Show Author Affiliations
Xiaoxing Feng, Univ. of Florida (United States)
Ankur Jain, Univ. of Florida (United States)
Sagnik Pal, Univ. of Florida (United States)
Lei Xiao, Univ. of Florida (United States)
Toshikazu Nishida, Univ. of Florida (United States)
Huikai Xie, Univ. of Florida (United States)

Published in SPIE Proceedings Vol. 6464:
MEMS/MOEMS Components and Their Applications IV
Srinivas A. Tadigadapa; Reza Ghodssi; Albert K. Henning, Editor(s)

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