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Proceedings Paper

Piston-tip-tilt positioning of a segmented MEMS deformable mirror
Author(s): Michael A. Helmbrecht; Thor Juneau
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Paper Abstract

Results of a calibrated open-loop controller for piston/tip/tilt positioning of a segmented deformable mirror are presented. The controller is based on a fit of a 3rd-order polynomial that maps desired positions to the electrode voltages that actuate the segments. In addition to mapping positions to voltages, the controller limits positions to within the reachable space of the device. Experimental testing shows that over nearly the entire 5 &mgr;m of stroke and ±4 mrad of tip and tilt operating range, the controller positions segments to better than 30 nm rms of surface-figure error.

Paper Details

Date Published: 9 February 2007
PDF: 6 pages
Proc. SPIE 6467, MEMS Adaptive Optics, 64670M (9 February 2007); doi: 10.1117/12.702653
Show Author Affiliations
Michael A. Helmbrecht, Iris AO, Inc. (United States)
Thor Juneau, SiTime, Inc. (United States)


Published in SPIE Proceedings Vol. 6467:
MEMS Adaptive Optics
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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