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Proceedings Paper

Nanoelectromechanical systems as single electron switches and field emitters
Author(s): Hyun S. Kim; Hua Qin; Robert H. Blick
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Paper Abstract

We measured field emission from a silicon nanopillar mechanically oscillating between two electrodes. The pillar has a height of about 200 nm and a diameter of 50 nm, allowing resonant mechanical excitations at radio frequencies. The tunneling barriers for field emission are mechanically modulated via displacement of the gold island on top of the pillar. We present a rich frequency-dependent response of the emission current in the frequency range of 300 ~ 400 MHz at room temperature. Modified Fowler-Nordheim field emission is observed and attributed to the mechanical oscillations of the nanopillar.

Paper Details

Date Published: 12 February 2007
PDF: 11 pages
Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 646407 (12 February 2007); doi: 10.1117/12.702611
Show Author Affiliations
Hyun S. Kim, Univ. of Wisconsin/Madison (United States)
Hua Qin, Univ. of Wisconsin/Madison (United States)
Robert H. Blick, Univ. of Wisconsin-Madison (United States)

Published in SPIE Proceedings Vol. 6464:
MEMS/MOEMS Components and Their Applications IV
Srinivas A. Tadigadapa; Reza Ghodssi; Albert K. Henning, Editor(s)

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