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Proceedings Paper

Optical coherent tomography (OCT) bio-imaging using 3D scanning micromirror
Author(s): J. Singh; Chan C. Hoe; Teo H. S. Jason; C. Nanguang; C. S. Premachandran; Collin J. R. Sheppard; M. Olivo
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Paper Abstract

Design and development of a 3D scanning MEMS micromirror integrated miniaturized optical probe has been presented in this article. The probe is designed to be less than 2 mm in diameter and has dynamic scanning modality for larger field of view. Scanning is achieved using 3D micromirror device, which has 16º out of plane and 360º beam rotation capability. Initial target of 45º out of plane deflection is yet to be achieved. The probe being developed currently would have scanning capability in one quarter of 360º full rotation. The field of view would still be very large and multiple optical biopsies would be possible for planned cancer model diagnostics. The feasibility of using scanning mirror into an optical probe was demonstrated using scanning repeatability and OCT imaging tests. Geometrical optics and package design using silicon optical bench have been established. Miniaturized 3D scanning micromirror have been designed and developed with 16º out of plane deflection demonstrated. Probe package integration and optical testing are carried out.

Paper Details

Date Published: 13 February 2007
PDF: 8 pages
Proc. SPIE 6432, Endoscopic Microscopy II, 64320C (13 February 2007); doi: 10.1117/12.702279
Show Author Affiliations
J. Singh, Institute of Microelectronics (Singapore)
Chan C. Hoe, Institute of Microelectronics (Singapore)
National Univ. of Singapore (Singapore)
Teo H. S. Jason, Institute of Microelectronics (Singapore)
C. Nanguang, National Univ. of Singapore (Singapore)
C. S. Premachandran, Institute of Microelectronics (Singapore)
Collin J. R. Sheppard, National Univ. of Singapore (Singapore)
M. Olivo, National Cancer Ctr. (Singapore)

Published in SPIE Proceedings Vol. 6432:
Endoscopic Microscopy II
Guillermo J. Tearney; Thomas D. Wang, Editor(s)

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