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Proceedings Paper

Electrostatic 1D microscanner with vertical combs for HD resolution display
Author(s): Jin-Woo Cho; Yong-Hwa Park; Young-Chul Ko; Byeung-Leul Lee; Seok-Jin Kang; Seok-Whan Chung; Won-kyoung Choi; Yong-Chul Cho; Seok-Mo Chang; Jin-Ho Lee; John Sunu
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Paper Abstract

An electrostatic 1 dimensionally (1D) scanning mirror for HD resolution display is introduced. Vertical comb drive was used to tilt the micro mirror. To minimize the moment of inertia and maximize the tilting angle of the mirror having the diameter of 1.6 mm, the rib was patterned on the backside of the mirror surface and optimized. Via the finite element simulation, the dynamic deformation of 45nm was achieved within the reflecting area in operating resonant mode thanks to the optimized rib structure. The actuating part of scanner was also optimized manipulating with several design variables to get maximum tilting angle. As the fabrication result, mechanical tilting angle of ±12.0 degree was achieved with the resonant frequency of 24.75kHz and the sinusoidal driving voltage of 280Vpp. For stable resonant motion of the scanner, the feedback control algorithm was realized in the driving circuit. Rigorous reliability characterization was carried out using statistical analysis on the fabricated samples. As a result, HD-resolution image with 720 progressive horizontal lines was demonstrated.

Paper Details

Date Published: 22 January 2007
PDF: 12 pages
Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660B (22 January 2007); doi: 10.1117/12.702163
Show Author Affiliations
Jin-Woo Cho, Samsung Advanced Institute of Technology (South Korea)
Yong-Hwa Park, Samsung Advanced Institute of Technology (South Korea)
Young-Chul Ko, Samsung Advanced Institute of Technology (South Korea)
Byeung-Leul Lee, Samsung Advanced Institute of Technology (South Korea)
Seok-Jin Kang, Samsung Advanced Institute of Technology (South Korea)
Seok-Whan Chung, Samsung Advanced Institute of Technology (South Korea)
Won-kyoung Choi, Samsung Advanced Institute of Technology (South Korea)
Yong-Chul Cho, Samsung Advanced Institute of Technology (South Korea)
Seok-Mo Chang, Samsung Advanced Institute of Technology (South Korea)
Jin-Ho Lee, Samsung Advanced Institute of Technology (South Korea)
John Sunu, Samsung Advanced Institute of Technology (South Korea)


Published in SPIE Proceedings Vol. 6466:
MOEMS and Miniaturized Systems VI
David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk, Editor(s)

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