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Proceedings Paper

Coated tips for scanning thermal microscopy
Author(s): Nicolás Duarte; Peter Eklund; Srinivas Tadigadapa
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Paper Abstract

This paper presents a unique solution to the inaccuracies produced when thermally scanning various micro and nano systems with thermistor tip scanning thermal microscopy (SThM). Under dc measurement conditions, thermistor tip heating induces perturbations in the measured system that change with sample properties like material and geometry. As a result, normal SThM scans are affected by errors that make it difficult to interpret the 2D-temperature scans of such systems. By coating the SThM tips with a thermally resistive material (100nm of Si3N4) we demonstrate that the temperature dependence on sample material and geometry can be minimized and the tip heating problem can be mitigated to that of a constant temperature offset problem. Included are the first images of coated scanning thermal microscopy (C-SThM) as well as a lumped model that describes the basis of the improvement seen in the thermal images.

Paper Details

Date Published: 12 February 2007
PDF: 12 pages
Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 646408 (12 February 2007); doi: 10.1117/12.702157
Show Author Affiliations
Nicolás Duarte, The Pennsylvania State Univ. (United States)
Peter Eklund, The Pennsylvania State Univ. (United States)
Srinivas Tadigadapa, The Pennsylvania State Univ. (United States)


Published in SPIE Proceedings Vol. 6464:
MEMS/MOEMS Components and Their Applications IV
Srinivas A. Tadigadapa; Reza Ghodssi; Albert K. Henning, Editor(s)

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