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Proceedings Paper

Compact and high efficiency polymer air-trench waveguide bends and splitters
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Paper Abstract

A fabrication process for PFCB waveguide air-trench bends with scanning electron microscope (SEM)-based electron beam lithography (EBL) and autoalignment has been developed and high efficiency air-trench bends (97.2% for TE polarization and 96.2% for TM polarization) have been demonstrated. We have successfully developed a high aspect ratio (18:1) anisotropic PFCB etch using a CO/O2 etch chemistry in an inductively coupled plasma reactive ion etcher (ICP RIE) for PFCB waveguide air-trench splitter fabrication. The fabricated splitters show a 90.1% overall efficiency and ~ 85-to-15 (85:15) splitting ratio for 950 nm wide splitter trench, which closely matches 2D-FDTD simulation results. Using air-trench bends, an ultracompact PFCB arrayed waveguide grating (AWG) 8 x 8 wavelength demultiplexer for Wavelength Division Multiplexing (WDM) application had been designed. Compared to a conventional AWG in the same material system, the air-trench bend AWG reduces the area required by a factor of 20. Compact ring resonators using these splitters and bends has been designed and fabrication and improvements are currently underway.

Paper Details

Date Published: 7 March 2007
PDF: 11 pages
Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620V (7 March 2007); doi: 10.1117/12.701359
Show Author Affiliations
Yongbin Lin, Univ. of Alabama in Huntsville (United States)
Nazli Rahmanian, Univ. of Alabama in Huntsville (United States)
Seunghyun Kim, Brigham Young Univ. (United States)
Gregory P. Nordin, Brigham Young Univ. (United States)


Published in SPIE Proceedings Vol. 6462:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary-Ann Maher; Thomas J. Suleski; Eric G. Johnson; Harold D. Stewart; Jung-Chih Chiao; Gregory P. Nordin, Editor(s)

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