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Proceedings Paper

Scalable high-power (>1kW/cm^2) diode laser stacks based on silicon monolithic micro-channel coolers
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Paper Abstract

We describe the performance and reliability of high power vertical diode stacks based on silicon monolithic microchannel coolers (SiMMs) operating at >1000W/cm2 CW at 808 and 940nm. The monolithic nature of these stacks makes them inherently robust and compact. Typical emitting dimensions for a 10-bar stack are ~8.8mm × 10mm with CW output power up to 1.5kW. Originally developed at Lawrence Livermore National Laboratory and now actively being developed for commercial applications at Coherent, this technology offers several advantages over current copper-based micro-channel coolers. These devices do not require use of DI water, strict monitoring and control of the pH level, careful control of the water velocity, or sealed cooling systems. The need for hydrostatic seals is also drastically reduced. A typical ten bar stack requires only 2 o-ring seals, compared to 20 such seals for a similar stack using copper microchannel cooling. Mature and readily available wet etching technology allows for cost effective batch fabrication of the sub-mount structure while achieving repeatable high precision components based on photolithographic fabrication processes.

Paper Details

Date Published: 7 February 2007
PDF: 11 pages
Proc. SPIE 6456, High-Power Diode Laser Technology and Applications V, 64560I (7 February 2007); doi: 10.1117/12.701350
Show Author Affiliations
Patrick Reichert, Coherent, Inc. (United States)
Michael Fouksman, Coherent, Inc. (United States)
Hailong Zhou, Coherent, Inc. (United States)
David Nabors, Coherent, Inc. (United States)
Jiro Alcala, Coherent, Inc. (United States)
Sherry Tolman, Coherent, Inc. (United States)
Mika Toivonen, Coherent Finland (Finland)
Sami Lehkonen, Coherent Finland (Finland)
Jouko Haapamaa, Coherent Finland (Finland)

Published in SPIE Proceedings Vol. 6456:
High-Power Diode Laser Technology and Applications V
Mark S. Zediker, Editor(s)

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