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Proceedings Paper

Core-shell diamond-like silicon photonic crystals from 3D polymer templates created by holographic lithography
Author(s): Jun Hyuk Moon; Yongan Xu; Wenting Dong; Seung-Man Yang; Joseph W. Perry; Ali Adibi; Shu Yang
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Paper Abstract

Diamond-like silicon photonic crystals were fabricated by sequential chemical vapor deposition of silica and silicon on polymer templates photopatterned by holographic lithography. The optical properties of the 3D crystals after each processing step were measured and compared to the corresponding bandgap simulation. The core-shell morphology formed during CVD process is approximated using two level surfaces.

Paper Details

Date Published: 6 February 2007
PDF: 7 pages
Proc. SPIE 6480, Photonic Crystal Materials and Devices VI, 64800P (6 February 2007); doi: 10.1117/12.701168
Show Author Affiliations
Jun Hyuk Moon, Univ. of Pennsylvania (United States)
Yongan Xu, Univ. of Pennsylvania (United States)
Wenting Dong, Georgia Institute of Technology (United States)
Seung-Man Yang, Korea Advanced Institute of Science and Technology (South Korea)
Joseph W. Perry, Georgia Institute of Technology (United States)
Ali Adibi, Georgia Institute of Technology (United States)
Shu Yang, Univ. of Pennsylvania (United States)


Published in SPIE Proceedings Vol. 6480:
Photonic Crystal Materials and Devices VI
Ali Adibi; Shawn-Yu Lin; Axel Scherer, Editor(s)

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