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Proceedings Paper

The Laser MicroJet (LMJ): a multi-solution technology for high quality micro-machining
Author(s): Tuan Anh Mai; Bernold Richerzhagen; Paul C. Snowdon; David Wood; Paul G. Maropoulos
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Paper Abstract

The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1]. The main issues by using these lasers are heat damages, contamination and low ablation rates. This report examines on the application of the Laser MicroJet(R) (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

Paper Details

Date Published: 20 March 2007
PDF: 7 pages
Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590P (20 March 2007); doi: 10.1117/12.701070
Show Author Affiliations
Tuan Anh Mai, Synova SA (Switzerland)
Bernold Richerzhagen, Synova SA (Switzerland)
Paul C. Snowdon, Durham Univ. (United Kingdom)
David Wood, Durham Univ. (United Kingdom)
Paul G. Maropoulos, Durham Univ. (United Kingdom)


Published in SPIE Proceedings Vol. 6459:
Laser-based Micro- and Nanopackaging and Assembly
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Friedrich G. Bachmann; Willem Hoving, Editor(s)

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