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Proceedings Paper

High-performance silicon scanning mirror for laser printing
Author(s): Wyatt O. Davis; Dean Brown; Mark Helsel; Randy Sprague; Greg Gibson; Arda Yalcinkaya; Hakan Urey
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Paper Abstract

This paper describes the design, fabrication, and characterization of the first MEMS scanning mirror with performance matching the polygon mirrors currently used for high-speed consumer laser printing. It has reflector dimensions of 8mm X 0.75mm, and achieves 80o total optical scan angle at an oscillation frequency of 5kHz. This performance enables the placement of approximately 14,000 individually resolvable dots per line at a rate of 10,000 lines per second, a record-setting speed and resolution combination for a MEMS scanner. The scanning mirror is formed in a simple microfabrication process by gold reflector deposition and patterning, and through-wafer deep reactive-ion etching. The scanner is actuated by off-the-shelf piezo-ceramic stacks mounted to the silicon structure in a steel package. Device characteristics predicted by a mathematical model are compared to measurements.

Paper Details

Date Published: 22 January 2007
PDF: 7 pages
Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660D (22 January 2007); doi: 10.1117/12.700849
Show Author Affiliations
Wyatt O. Davis, Microvision, Inc. (United States)
Dean Brown, Microvision, Inc. (United States)
Mark Helsel, North Seattle Community College (United States)
Randy Sprague, Microvision, Inc. (United States)
Greg Gibson, Microvision, Inc. (United States)
Arda Yalcinkaya, Koç Univ. (Turkey)
Hakan Urey, Koç Univ. (Turkey)


Published in SPIE Proceedings Vol. 6466:
MOEMS and Miniaturized Systems VI
David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk, Editor(s)

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