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Fabrication of micromechanical and microoptical systems by two-photon polymerization
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Paper Abstract

The recently developed two-photon polymerisation technique is used for the fabrication of two- and three-dimensional structures in photosensitive inorganic-organic hybrid material (ORMOCER), in SU8 , and in positive tone resist with resolutions down to 100nm. In this contribution we present applications of this powerful technology for the realization of micromechanical systems and microoptical components. We will demonstrate results on the fabrication of complex movable three-dimensional micromechanical systems and microfluidic components which cannot be realized by other technologies. This approach of structuring photosensitive materials also provides unique possibilities for the fabrication of different microoptical components such as arbitrary shaped microlenses, microprisms, and 3D-photonic crystals with high optical quality.

Paper Details

Date Published: 22 January 2007
PDF: 9 pages
Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 64660M (22 January 2007); doi: 10.1117/12.700668
Show Author Affiliations
Carsten Reinhardt, Laser Zentrum Hannover e.V. (Germany)
A. Ovsianikov, Laser Zentrum Hannover e.V. (Germany)
Sven Passinger, Laser Zentrum Hannover e.V. (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 6466:
MOEMS and Miniaturized Systems VI
David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk, Editor(s)

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