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Proceedings Paper

Germanium on silicon photodetectors for telecom wavelengths
Author(s): Laurent Vivien; Mathieu Rouvière; Xavier Le Roux; Juliette Mangeney; Paul Crozat; Delphine Marris-Morini; Daniel Pascal; Eric Cassan; Suzanne Laval; Jean-François Damlencourt; Loubna El Melhaoui; Jean-Marc Fédéli
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Paper Abstract

This paper reports on fabrication and characterization of two kinds of photodetectors: interdigited metal-germanium on silicon-metal photodetectors (Metal-Semiconductor-Metal or MSM) and pin germanium photodiodes for operation at optical telecommunication wavelengths. For both 1.31 micron and 1.55 micron wavelengths, the measured -3dB bandwidth of interdigited MSM photodetectors is 35 GHz under 2V bias for electrode spacing equal to 0.5 micron. For pin diodes at 1.55 micron wavelength, the measured -3dB bandwidth under -3V bias ranges from 9 to 29 GHz for mesa diameters from 20 to 7 microns, respectively.

Paper Details

Date Published: 14 February 2007
PDF: 8 pages
Proc. SPIE 6477, Silicon Photonics II, 647707 (14 February 2007); doi: 10.1117/12.700621
Show Author Affiliations
Laurent Vivien, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
Mathieu Rouvière, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
STMicroelectronics (France)
Xavier Le Roux, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
Juliette Mangeney, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
Paul Crozat, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
Delphine Marris-Morini, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
Daniel Pascal, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
Eric Cassan, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
Suzanne Laval, Institut d'Electronique Fondamentale, CNRS, Univ. Paris-Sud II (France)
Jean-François Damlencourt, CEA-LETI (France)
Loubna El Melhaoui, CEA-LETI (France)
Jean-Marc Fédéli, CEA-LETI (France)


Published in SPIE Proceedings Vol. 6477:
Silicon Photonics II
Joel A. Kubby; Graham T. Reed, Editor(s)

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