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Proceedings Paper

Optical waveguide biosensor based on 2D diffractive elements obtained by nano-imprint lithography
Author(s): Sonia Grego; Yang Cao; Christopher A. Bower; Brian R. Stoner; Thomas J. Suleski
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Paper Abstract

This work focuses on the effects of custom-designed, two-dimensional grating structures on the sensitivity of optical waveguides biosensors in the input grating coupler configuration. Calculations suggest that suitably designed diffractive structures with optimum pitch in two orthogonal directions can increase the sensitivity of devices when compared to a conventional one-dimensional grating under the same conditions. A set of six diffractive structures designed for 1550 nm wavelength were fabricated by thermal nano-imprint lithography on silicon oxynitride waveguides; the silicon master stamp was patterned by deep UV stepper lithography. Preliminary experimental results indicate a sensitivity enhancement of a factor two due to the 2D diffractive couplers.

Paper Details

Date Published: 2 March 2007
PDF: 7 pages
Proc. SPIE 6475, Integrated Optics: Devices, Materials, and Technologies XI, 647504 (2 March 2007); doi: 10.1117/12.700616
Show Author Affiliations
Sonia Grego, RTI International (United States)
Yang Cao, Univ. of North Carolina/Charlotte (United States)
Christopher A. Bower, RTI International (United States)
Brian R. Stoner, RTI International (United States)
Thomas J. Suleski, Univ. of North Carolina/Charlotte (United States)


Published in SPIE Proceedings Vol. 6475:
Integrated Optics: Devices, Materials, and Technologies XI
Yakov Sidorin; Christoph A. Waechter, Editor(s)

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