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Proceedings Paper

Machining hole arrays in polyimide using a UV solid state laser and predetermined temporal pulse patterns
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Paper Abstract

A solid-state UV laser was used to make arrays of reproducible percussion-drilled micron-sized holes in polyimide. An optical switch was employed as a pulse picker to select specific patterns of pulses from the high repetition rate laser beam. The ability to control and vary the number of pulses per burst and the time between bursts enhanced the drilling rate while minimizing thermal damage around the holes. The optimum pulse patterns were determined experimentally. A photodiode acted as a breakthrough sensor to end the drilling and optimize the exit hole size and quality. Results were compared with computer simulations of the drilling process based on modeling of the laser/material interaction.

Paper Details

Date Published: 20 March 2007
PDF: 12 pages
Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590G (20 March 2007); doi: 10.1117/12.700592
Show Author Affiliations
Claire Mullan, National Univ. of Ireland/Galway (Ireland)
Diana Ilie, National Univ. of Ireland/Galway (Ireland)
Gerard M. O'Connor, National Univ. of Ireland/Galway (Ireland)
Sebastian Favre, National Univ. of Ireland/Galway (Ireland)
Thomas J. Glynn, National Univ. of Ireland/Galway (Ireland)

Published in SPIE Proceedings Vol. 6459:
Laser-based Micro- and Nanopackaging and Assembly
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Friedrich G. Bachmann; Willem Hoving, Editor(s)

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