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Proceedings Paper

Adaptive scanning optical microscope (ASOM): large field of view and high resolution imaging using a MEMS deformable mirror
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Paper Abstract

For a wide range of applications in biology, medicine, and manufacturing, the small field of view associated with high resolution microscope systems poses a significant challenge in practice. This paper describes an optical microscope design, called the Adaptive Scanning Optical Microscope (ASOM), which uses a MEMS deformable mirror working with a specially designed scanning lens to achieve a greatly expanded field of view. Most adaptive optics systems (e.g. telescopes and ophthalmology instruments) are designed to achieve near ideal performance under nominal operating conditions and primarily use the adaptive optics element to compensate for a time varying disturbance to the wavefront that is external to the optical system. In contrast to this approach, the deformable mirror in the ASOM is an integral component of the optical system and the static (glass) optical elements have been specifically designed to match the shape correcting capabilities of the deformable mirror. Using a high speed steering mirror coordinated with the deformable mirror actuation voltages, the ASOM operates by scanning over the workspace and should achieve diffraction limited imaging over a region approximately two orders of magnitude larger in area than a traditional microscope design. With the rapid scanning capabilities allowed by the high speed steering mirror and by acquiring a complete image during each exposure, the ASOM offers advantages in dynamically reconfigurable and adaptable imaging with no agitation to the workspace. After describing the design and operating principle of the ASOM, we present results from a low cost ASOM prototype.

Paper Details

Date Published: 9 February 2007
PDF: 12 pages
Proc. SPIE 6467, MEMS Adaptive Optics, 646706 (9 February 2007); doi: 10.1117/12.700538
Show Author Affiliations
Benjamin Potsaid, Rensselaer Polytechnic Institute (United States)
Linda Ivonne Rivera, Rensselaer Polytechnic Institute (United States)
John Ting-Yung Wen, Rensselaer Polytechnic Institute (United States)

Published in SPIE Proceedings Vol. 6467:
MEMS Adaptive Optics
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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