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Proceedings Paper

Potentials of fiber laser technology in microfabrication
Author(s): Volker Franke; Udo Klotzbach; Michael Panzner; Roger Püschel
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Paper Abstract

Over the recent years the novel fiber laser technology and its potentials have been exciting laser manufacturers as well as researchers and industrial users. Fiber lasers with their excellent beam quality promised noticeable advantages and improvements in high precision and micro material processing. Besides the excellent beam quality there are more advantages of the fiber laser technology such as compact installation size, high laser efficiency, moderate system price and easy to be integrated. The paper presents the results of extensive comparative tests of short pulse fiber laser systems and a common q-switch rod solid state laser with nearly identical system parameters. The intention was to determine the specific advantages in practical application work. Where are the advantage and how large are the improvements? Therefore typical applications of laser micro machining have been chosen - drilling, cutting and lateral material removal as well as marking. By choosing different materials like aluminum, silicon and ruby a broad field has been examined. Distinct improvements have been proven in several applications especially regarding precision and surface quality of the created structures. Under almost identical conditions the fiber laser achieved more narrow cutting kerfs and smaller hole diameters compared to the rod laser system.

Paper Details

Date Published: 20 March 2007
PDF: 10 pages
Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590J (20 March 2007); doi: 10.1117/12.700486
Show Author Affiliations
Volker Franke, Fraunhofer Institute Material and Beam Technology (Germany)
Udo Klotzbach, Fraunhofer Institute Material and Beam Technology (Germany)
Michael Panzner, Fraunhofer Institute Material and Beam Technology (Germany)
Roger Püschel, Fraunhofer Institute Material and Beam Technology (Germany)

Published in SPIE Proceedings Vol. 6459:
Laser-based Micro- and Nanopackaging and Assembly
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Friedrich G. Bachmann; Willem Hoving, Editor(s)

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