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Proceedings Paper

Integration and characterization of SiN nanopores for single-molecule detection in liquid-core ARROW waveguides
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Paper Abstract

We demonstrate a method for integrating silicon nitride nanopores in liquid core Anti Resonant Reflecting Optical Waveguides (ARROW) for single molecule electrical detection and control. We use a two-step integration process when a micropore is fabricated first, paving the way for subsequent nanopore integration in the first silicon nitride layer of the ARROW structure. Nanopores with dimensions as small as 11 nm were fabricated using a Focused Ion Beam shrinking process commensurate with single particle gating of viruses, proteins, ribosomes and other biomolecules.

Paper Details

Date Published: 14 February 2007
PDF: 11 pages
Proc. SPIE 6444, Ultrasensitive and Single-Molecule Detection Technologies II, 64440L (14 February 2007); doi: 10.1117/12.700479
Show Author Affiliations
M. I. Rudenko, Univ. of California, Santa Cruz (United States)
D. Yin, Univ. of California, Santa Cruz (United States)
M. Holmes, Brigham Young Univ. (United States)
A. R. Hawkins, Brigham Young Univ. (United States)
H. Schmidt, Univ. of California, Santa Cruz (United States)


Published in SPIE Proceedings Vol. 6444:
Ultrasensitive and Single-Molecule Detection Technologies II
Jorg Enderlein; Zygmunt K. Gryczynski, Editor(s)

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