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Proceedings Paper

Verification of thin film processes in a virtual fabrication environment
Author(s): T. Schmidt; D. Ortloff; J. Popp; K. Hahn; R. Brück; A. Hössinger
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Paper Abstract

Thin film fabrication processes for MEMS are characterized by a variety of different process technologies and materials. Unlike in microelectronics the MEMS fabrication process is in most cases application specific and therefore integral part of the application design. Discovering the correct combination of process steps, materials and process parameters usually requires many expensive and time consuming experiments. This paper presents a new software system that supports the MEMS device and process designers in managing their process knowledge and in verifying their fabrication processes in virtual fabrication environment, thus reducing the number of real world experiments to a minimum.

Paper Details

Date Published: 7 March 2007
PDF: 8 pages
Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620G (7 March 2007); doi: 10.1117/12.700379
Show Author Affiliations
T. Schmidt, Univ. of Siegen (Germany)
D. Ortloff, Process Relations GmbH (Germany)
J. Popp, Process Relations GmbH (Germany)
K. Hahn, Univ. of Siegen (Germany)
R. Brück, Univ. of Siegen (Germany)
A. Hössinger, Silvaco Technology Ctr. (United Kingdom)


Published in SPIE Proceedings Vol. 6462:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary-Ann Maher; Thomas J. Suleski; Eric G. Johnson; Harold D. Stewart; Jung-Chih Chiao; Gregory P. Nordin, Editor(s)

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