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Proceedings Paper

Integrated nanomechanical motion detection by means of optical evanescent wave coupling
Author(s): I. De Vlaminck; J. Roels; D. Taillaert; D. Van Thourhout; L. Lagae; R. Baets; G. Borghs
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Paper Abstract

A central problem in the development of mechanical devices and systems is accurate and fast motion sensing. We demonstrate an integrated and near-field optical displacement sensing technique based on optical evanescent wave coupling. Exploiting the strong dependence of waveguide-to-waveguide coupling to changes in separation between waveguides we were able to detect in- and out-of-plane mechanical motions of a mechanical resonator. We have studied the sensitivity of the proposed motion detection technique with a 3D full-vectorial mode solver and make predictions on the attainable displacement detection limits based on a noise analysis. This work demonstrates both the feasibility and the effectiveness of integrating nanomechanical devices with photonic circuitry.

Paper Details

Date Published: 12 February 2007
PDF: 9 pages
Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640E (12 February 2007); doi: 10.1117/12.700374
Show Author Affiliations
I. De Vlaminck, Imec (Belgium)
J. Roels, Ghent Univ.-IMEC (Belgium)
D. Taillaert, Ghent Univ.-IMEC (Belgium)
D. Van Thourhout, Ghent Univ.-IMEC (Belgium)
L. Lagae, Imec (Belgium)
R. Baets, Ghent Univ.-IMEC (Belgium)
G. Borghs, Imec (Belgium)

Published in SPIE Proceedings Vol. 6464:
MEMS/MOEMS Components and Their Applications IV
Srinivas A. Tadigadapa; Reza Ghodssi; Albert K. Henning, Editor(s)

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