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Proceedings Paper

Microfabricated 3D polymeric structure with SU-8
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Paper Abstract

Arbitrarily complex 3-D polymeric structures with a resolution of under 100 nm are fabricated by two-photon absorption polymerization (TPAP) by an ultra-short pulsed laser. This method can be applied to many scientific and engineering fields such as micro/nano-optics, MEMS, microfluidic system, and so on. Many 3-D structures by TPA fabrication have been made. However the structures made with an acrylate-based prepolymer material have seriously structural problems, such as shrinkage, collapse, distortion, etc. These problems make the fabrication of a large and fine 3-D structure difficult. Using an epoxy-based material like SU-8, which is widely used in the conventional lithography, the problems above can be prevented. Although SU-8 is designed for the UV lithography, a two-photon absorbing dye and proton acid generator can make it a base prepolymer material for the two-photon absorption polymerization. We studied the size of voxel or the resolution of fabrication from the SU-8 structures under the various fabrication conditions such as the laser output power and the exposure time. We demonstrated 3-D micro/nano structures with SU-8 and compared them with same structure with SCR-500.

Paper Details

Date Published: 7 March 2007
PDF: 10 pages
Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 646206 (7 March 2007); doi: 10.1117/12.700367
Show Author Affiliations
Shin Wook Yi, Korea Advanced Institute of Science and Technology (South Korea)
Hong Jin Kong, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 6462:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary-Ann Maher; Thomas J. Suleski; Eric G. Johnson; Harold D. Stewart; Jung-Chih Chiao; Gregory P. Nordin, Editor(s)

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