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Proceedings Paper

An indium phosphide-based near-infrared MOEMS microspectrometer for agri-food and environmental monitoring
Author(s): Michel Garrigues; J. Leclercq; Romain Gil-Sobraqués; Olivier Parillaud; Michel Crochon; Jean-Michel Roger; Octave Amore; Bruno Vilotitch
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Paper Abstract

The general aim of this project is to realize optical microsystems for NIR spectroscopy (1.5 μm to 2 μm) using the InP/InGaAs material system. We have designed an integrated microspectrometer based on a long-wavelength strained InGaAs quantum well RCE photodiode combined with a wavelength tunability function (MEMS concept). The weak absorption of the QWs is enhanced by embedding the quantum wells into a micromachined tunable vertical resonator that consists of multiple InP/air-gap alternate layers that form both the DBR reflectors and the electrostatically tunable air-gap cavity. The devices are fabricated using a specific MOEMS process based on selective wet etching of an InP/InGaAs epitaxial layer stack grown by MOVPE. The small size and low cost of these microsystems pave the way to promising industrial applications, such as non-invasive biological analysis, on-line industrial process analysis and hyperspectral imaging. The paper focuses on critical design and process issues in order to accommodate residual stresses in the suspended membranes while preserving a suitable tuning range. We present a specific design optimized for the monitoring of sugar concentration in water. The selected spectral range for this analysis is comprised between 1650 nm and 1750 nm.

Paper Details

Date Published: 22 January 2007
PDF: 12 pages
Proc. SPIE 6466, MOEMS and Miniaturized Systems VI, 646607 (22 January 2007); doi: 10.1117/12.700256
Show Author Affiliations
Michel Garrigues, École Centrale de Lyon, LEOM (France)
J. Leclercq, École Centrale de Lyon, LEOM (France)
Romain Gil-Sobraqués, École Centrale de Lyon, LEOM (France)
Olivier Parillaud, Alcatel Thalès III-V Lab. (France)
Michel Crochon, CEMAGREF, ITAP (France)
Jean-Michel Roger, CEMAGREF, ITAP (France)
Octave Amore, Datalink Instruments (France)
Bruno Vilotitch, Datalink Instruments (France)

Published in SPIE Proceedings Vol. 6466:
MOEMS and Miniaturized Systems VI
David L. Dickensheets; Bishnu P. Gogoi; Harald Schenk, Editor(s)

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