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Proceedings Paper

Pulsed laser ablation for volume fabrication of micro-optical arrays on large-area substrates
Author(s): J. E. A. Pedder; A. S. Holmes; Ric Allott; Karl Boehlen
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Paper Abstract

Laser micromachining by ablation is an established technique for the production of 2.5D and 3D features in a wide variety of materials. Mask projection techniques using excimer lasers have been used to fabricate microstructures on large panels where diamond turning and reflow techniques have reached their limits. We have developed 3D structuring tools based upon UV laser ablation of polymers to create large arrays of repeating micro-optical features. Synchronization of laser pulses with workpiece movement allows layer-by-layer growth of deep structures with outstanding repeatability. Here, we show recent developments in laser structuring with the combination of half-tone and binary mask techniques. Significant improvements in surface quality are demonstrated for a limited range of structures.

Paper Details

Date Published: 7 March 2007
PDF: 7 pages
Proc. SPIE 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII, 64620W (7 March 2007); doi: 10.1117/12.700235
Show Author Affiliations
J. E. A. Pedder, Oerlikon Components Optics UK (United Kingdom)
A. S. Holmes, Imperial College London (United Kingdom)
Ric Allott, Oerlikon Components Optics UK (United Kingdom)
Karl Boehlen, Oerlikon Components Optics UK (United Kingdom)


Published in SPIE Proceedings Vol. 6462:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Mary-Ann Maher; Harold D. Stewart; Jung-Chih Chiao; Thomas J. Suleski; Eric G. Johnson; Gregory P. Nordin, Editor(s)

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