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Proceedings Paper

White light interferometric profile measurement system using spectral coherence
Author(s): Gao-Wei Chang; Yu-Hsuan Lin; Zong-Mu Yeh
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Paper Abstract

It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance.

Paper Details

Date Published: 19 January 2007
PDF: 11 pages
Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630I (19 January 2007); doi: 10.1117/12.700003
Show Author Affiliations
Gao-Wei Chang, National Taiwan Normal Univ. (Taiwan)
Yu-Hsuan Lin, National Taiwan Normal Univ. (Taiwan)
Zong-Mu Yeh, National Taiwan Normal Univ. (Taiwan)


Published in SPIE Proceedings Vol. 6463:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
Allyson L. Hartzell; Rajeshuni Ramesham, Editor(s)

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