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Proceedings Paper

TEM investigation of laser-induced periodic surface structures on polymer surfaces
Author(s): Úna Prendergast; Sylwester Kudzma; Richard Sherlock; Claire O'Connell; Thomas Glynn
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Paper Abstract

Laser Induced Periodic Surface Structures (LIPSS) may have numerous applications, ranging from biomaterial applications to LCDs, microelectronic fabrication and photonics. However, in order to control the development of these structures for their particular application, it is necessary to understand how they are generated. We report our work on investigating the melting that occurs during LIPSS formation. LIPSS were generated on three polymer surfaces - polyethylene terephthalate (PET), amorphous polycarbonate (APC) and oriented crystalline polycarbonate (OPC) - which were irradiated with a polarized ArF excimer laser (193 nm) beam with fluences between 3 and 5 mJ/cm2. The structures were imaged using a Transmission Electron Microscope (TEM), which facilitated investigation of changes in the polymer structures and consequently the depth of the melt zone that accompanies LIPSS generation. We also present theoretical calculations of the temperature-depth profile due to the interaction of the low fluence 193 nm laser beam with the polymer surfaces and compare these calculations with our experimental results.

Paper Details

Date Published: 13 March 2007
PDF: 10 pages
Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 64581V (13 March 2007); doi: 10.1117/12.699999
Show Author Affiliations
Úna Prendergast, National Univ. of Ireland/Galway (Ireland)
Sylwester Kudzma, National Univ. of Ireland/Galway (Ireland)
Richard Sherlock, National Univ. of Ireland/Galway (Ireland)
Claire O'Connell, National Univ. of Ireland/Galway (Ireland)
Thomas Glynn, National Univ. of Ireland/Galway (Ireland)


Published in SPIE Proceedings Vol. 6458:
Photon Processing in Microelectronics and Photonics VI
David B. Geohegan; Frank Träger; Jan J. Dubowski; Craig B. Arnold; Tatsuo Okada; Michel Meunier; Andrew S. Holmes, Editor(s)

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