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Proceedings Paper

Laser direct-write and crystallization of FeSi2 micro-dot array for NIR light-emitting device application
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Paper Abstract

We printed FeSi2 micro-dot array on various kinds of substrates utilizing laser-induced forward transfer (LIFT). An amorphous FeSi2 was deposited by sputtering on a transparent plate as a source film. A single KrF excimer laser pulse through a mask-projection system was imaged with a small micrometer-sized grid pattern onto a film/plate interface, resulting in the deposition of FeSi2 micro-dot array on a facing substrate with a high number density of 104 mm-2. FeSi2 in the &bgr; crystalline phase is a promising eco-friendly semiconductor because of NIR electroluminescence used for optical networking as well as abundant components reserve on the earth and non-toxicity. However, the &bgr;-FeSi2 film fabrication generally required high-temperature multi-processes which hamper its integration and performance reproducibility. Using the LIFT of micro-dot array, we succeeded in room-temperature preparation of &bgr;-FeSi2. Micro-Raman spectroscopy confirmed the &bgr; crystalline phase in the micro-dots deposited on an unheated silica glass substrate. Thus, the LIFT is useful for integrating functional micro-dot array accompanied by the crystallization at lower temperatures.

Paper Details

Date Published: 13 March 2007
PDF: 8 pages
Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 645814 (13 March 2007); doi: 10.1117/12.699835
Show Author Affiliations
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Ryozo Kurosaki, National Institute of Advanced Industrial Science and Technology (Japan)
Tadatake Sato, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshizo Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6458:
Photon Processing in Microelectronics and Photonics VI
David B. Geohegan; Craig B. Arnold; Tatsuo Okada; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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