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Proceedings Paper

Fabrication of a microfluidic bioarray device using laser-machined surface microstructures
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Paper Abstract

Laser-induced backside wet etching (LIBWE) method has been developed as a technique for micromachining of transparent materials. Such technique can be applied for fabricating microfluidic devices used as "Lab on a Chip" or total microanalysis system (μTAS). In such devices, various functions are integrated onto one chip. Microstructure with 1μm resolution fabricated within microfluidic channels can afford additional functions to the chip. Color-encoded microbeads with surface functional groups randomly arranged in the microstructure can be used for bioarray analyses. We have fabricated a novel microfluidic device incorporating two-dimensional array of microbeads with 10 μm diameter. The performance of the microfluidic bead array was confirmed by a capturing experiment of DNA.

Paper Details

Date Published: 13 March 2007
PDF: 9 pages
Proc. SPIE 6458, Photon Processing in Microelectronics and Photonics VI, 64580B (13 March 2007); doi: 10.1117/12.699680
Show Author Affiliations
Tadatake Sato, National Institute of Advanced Industrial Science and Technology (Japan)
Ryozo Kurosaki, National Institute of Advanced Industrial Science and Technology (Japan)
Aiko Narazaki, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshizo Kawaguchi, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6458:
Photon Processing in Microelectronics and Photonics VI
David B. Geohegan; Craig B. Arnold; Tatsuo Okada; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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