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Proceedings Paper

Simple measurement technique for resonance frequency of micromachined cantilevers
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Paper Abstract

This paper discusses a simple electrical measurement technique to determine resonance frequency of surface micromachined cantilever beams that is also suitable for packaged devices. Measurements are done on oxide anchored doped polysilicon beams. If the beam is driven by an AC signal riding on the DC bias, the beam starts vibrating. When the drive frequency matches the natural frequency of the beam, the oscillation amplitude is maximum. In this measurement, the DC bias is fixed at a value lower than the pull-in voltage. A small AC bias is then applied such that the sum of the DC and the maximum amplitude of the AC is less than the pull-in voltage. The frequency of the AC is then swept and at resonance, because of large displacement, the beam is pulled in and this is detected by a current flowing between the beam and the substrate. By iteratively adjusting the DC bias it is possible to make sure that pull-in occurs only due to resonance and the frequency setting at this point gives the natural frequency of the beam. Measured values for different beam lengths were compared with Doppler Vibrometry results and gave an excellent match.

Paper Details

Date Published: 19 January 2007
PDF: 8 pages
Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630N (19 January 2007); doi: 10.1117/12.698280
Show Author Affiliations
Somashekara Bhat, Indian Institute of Technology, Madras (India)
Enakshi Bhattacharya, Indian Institute of Technology, Madras (India)


Published in SPIE Proceedings Vol. 6463:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
Allyson L. Hartzell; Rajeshuni Ramesham, Editor(s)

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