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Proceedings Paper

Low-loss integrated planar chalcogenide waveguides for chemical sensing
Author(s): Juejun Hu; Vladimir Tarasov; Nathan Carlie; Rong Sun; Laeticia Petit; Anu Agarwal; Kathleen Richardson; Lionel Kimerling
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Paper Abstract

Chalcogenide glasses are an ideal material candidate for evanescent biochemical sensing due to their mid and far-infrared transparency. We have fabricated and tested, to the best of our knowledge, the first microfluidic device monolithically integrated with planar chalcogenide glass waveguides. High-index-contrast channel waveguides have been defined using plasma etching in thermally evaporated Ge23Sb7S70 films, followed by microfluidic channel patterning in photocurable resin (SU8) and channel sealing by a polydimethylsiloxane (PDMS) cover. Using this device, N-methylaniline can be detected using its well-defined absorption fingerprint of the N-H bond near 1496 nm. Our measurements indicate linear response of the sensor to varying N-methylaniline concentrations and a sensitivity of this sensor down to N-methylaniline concentration of 0.7 vol. %. Thermal reflow has been employed as an effective method to smooth chalcogenide waveguide sidewall roughness from 6.1 nm to 0.56 nm. Given the low-cost fabrication process and robust device configuration, our integration scheme provides a promising device platform for infrared chemical sensing applications.

Paper Details

Date Published: 14 February 2007
PDF: 8 pages
Proc. SPIE 6444, Ultrasensitive and Single-Molecule Detection Technologies II, 64440N (14 February 2007); doi: 10.1117/12.696996
Show Author Affiliations
Juejun Hu, Massachusetts Institute of Technology (United States)
Vladimir Tarasov, Massachusetts Institute of Technology (United States)
Nathan Carlie, Clemson Univ. (United States)
Rong Sun, Massachusetts Institute of Technology (United States)
Laeticia Petit, Clemson Univ. (United States)
Anu Agarwal, Massachusetts Institute of Technology (United States)
Kathleen Richardson, Clemson Univ. (United States)
Lionel Kimerling, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 6444:
Ultrasensitive and Single-Molecule Detection Technologies II
Jorg Enderlein; Zygmunt K. Gryczynski, Editor(s)

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