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Proceedings Paper

The set of the detection and resolution criteria for a phase modulation microscope
Author(s): Vladimir A. Andreev; Konstantin V. Indukaev
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Paper Abstract

The principle of operation and design of the phase interferometric microscope is studied. The description of construction and method of work of microscope MIM-2, created according to this principle is given. With the help of this modulation interferometric microscope the vertical resolution up to shares of nanometers and lateral resolution up to tens nanometers is achieved. The simple model of phase relief creation is formulated. With the help of this model the set of the resolution and discovering criteria for some simple objects such as a column, a step, a groove, a long bulge and so on is formulated.

Paper Details

Date Published: 8 August 2006
PDF: 13 pages
Proc. SPIE 6165, Saratov Fall Meeting 2005: Laser Physics and Photonics, Spectroscopy and Molecular Modeling VI, 61650E (8 August 2006); doi: 10.1117/12.696851
Show Author Affiliations
Vladimir A. Andreev, AMPHORA Labs. (Russia)
Konstantin V. Indukaev, AMPHORA Labs. (Russia)


Published in SPIE Proceedings Vol. 6165:
Saratov Fall Meeting 2005: Laser Physics and Photonics, Spectroscopy and Molecular Modeling VI
Vladimir L. Derbov; Leonid A. Melnikov; Lev M. Babkov, Editor(s)

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