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Proceedings Paper

Aspects of laser micromachining for sensor prototyping
Author(s): Phillip J. McMahon; Richard Muscat; Peter Vincent; Alan Wilson
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Paper Abstract

Recent advances in UV laser machining have allowed the development of accurate and rapid prototyping of micro scale devices. Two examples are presented of how modern UV laser micro machining may be applied to novel applications in engineering research and the development of state of the art micro sensors for structural health monitoring. We also show how micro device development is now a rapid process where novel procedures allowing the manual handling of work pieces may be used to make two layer laser machined devices with alignment to tens of microns.

Paper Details

Date Published: 20 December 2006
PDF: 8 pages
Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150S (20 December 2006); doi: 10.1117/12.696536
Show Author Affiliations
Phillip J. McMahon, Defence Science and Technology Organization (Australia)
Richard Muscat, Defence Science and Technology Organization (Australia)
Peter Vincent, Defence Science and Technology Organization (Australia)
Alan Wilson, Defence Science and Technology Organization (Australia)


Published in SPIE Proceedings Vol. 6415:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David Victor Thiel, Editor(s)

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