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Proceedings Paper

Electrical detection of biomolecules in a PDMS micro-fluidic channel using a MOSFET-type biosensor
Author(s): Jang-Kyoo Shin; Dong-Sun Kim; Geunbae Lim; Shuichi Shoji
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Paper Abstract

In this article, we report a MOSFET-type biosensor assembled in a polydimethylsiloxane (PDMS) micro-fluidic channel for the electrical detection of nano-scale biomolecules. The MOSFET-type sensor was fabricated on the basis of standard complementary metal oxide semiconductor (CMOS) technology. Au which has a chemical affinity with thiol by forming a self-assembled monolayer (SAM) was used as the gate metal. In order to apply to the hybrid micro-flow-system for a prototype lab-on-a-chip, the PDMS layer with the micro-channel was aligned along with the sensing area of the MOSFET device. Thiol which was injected into the micro-fluidic channel was detected by measuring the electrical characteristics of the MOSFET sensor in both ex-situ and in-situ due to the negative charge of thiol.

Paper Details

Date Published: 14 December 2006
PDF: 8 pages
Proc. SPIE 6416, Biomedical Applications of Micro- and Nanoengineering III, 641612 (14 December 2006); doi: 10.1117/12.696050
Show Author Affiliations
Jang-Kyoo Shin, Kyungpook National Univ. (South Korea)
Dong-Sun Kim, Kyungpook National Univ. (South Korea)
Geunbae Lim, Pohang Univ. of Science and Technology (South Korea)
Shuichi Shoji, Waseda Univ. (Japan)


Published in SPIE Proceedings Vol. 6416:
Biomedical Applications of Micro- and Nanoengineering III
Dan V. Nicolau, Editor(s)

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