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Proceedings Paper

Modelling of coplanar waveguide transmission lines in multiple metal layer processes
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Paper Abstract

Accurate characterisation of transmission lines is essential in enabling the design of Monolithic Microwave Integrated Circuits (MMICs) or Radio Frequency Integrated Circuits (RFICs). One RFIC technology currently being pursued is Silicon on Sapphire Complementary Metal Oxide Semiconductor (CMOS) technology. CMOS processes typically involve stacked metal layer structures and the correct method of modelling coplanar waveguides in CMOS is unclear. This paper reports on preliminary studies into electromagnetic design, with an emphasis on correctly predicting losses associated with these structures.

Paper Details

Date Published: 11 January 2007
PDF: 7 pages
Proc. SPIE 6414, Smart Structures, Devices, and Systems III, 64141R (11 January 2007); doi: 10.1117/12.695676
Show Author Affiliations
E. Heading, Flinders Univ. (Australia)
H. J. Hansen, Defence Science and Technology Organisation (Australia)
M. E. Parker, Defence Science and Technology Organisation (Australia)

Published in SPIE Proceedings Vol. 6414:
Smart Structures, Devices, and Systems III
Said F. Al-Sarawi, Editor(s)

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