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Proceedings Paper

Fabrication processes of MEMS phase shifters on polymer-based substrates
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Paper Abstract

RF phase shifters find wide applications in telecommunications, satellite systems, personal wireless communication systems, radar systems, tracking systems, and sensors. They have been conventionally manufactured by semiconductor technologies which suffer from high insertion losses due to high RF series resistances. They are expensive due to fabrication and assembly costs. The RF MEMS phase shifters provide low insertion losses, low fabrication costs and high linearity compared with the semiconductor ones. Furthermore, polymer materials have demonstrated low material costs and low RF attenuations. In this work, we proposed to build RF MEMS phase shifters on polymer substrates. The proposed devices were successfully manufactured and tested from DC to 26 GHz. Our experimental results indicated more than 35 degrees phase shifts and low insertion losses.

Paper Details

Date Published: 20 December 2006
PDF: 8 pages
Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 641515 (20 December 2006); doi: 10.1117/12.695577
Show Author Affiliations
Jianqun Wang, Univ. of Texas at Arlington (United States)
Thermpon Ativanichayaphong, Univ. of Texas at Arlington (United States)
Ying Cai, Univ. of Texas at Arlington (United States)
Wen-Ding Huang, Univ. of Texas at Arlington (United States)
Lun-Chen Hsu, Univ. of Texas at Arlington (United States)
W. Alan Davis, Univ. of Texas at Arlington (United States)
Mu Chiao, Univ. of British Columbia (Canada)
J.-C. Chiao, Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 6415:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David Victor Thiel, Editor(s)

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