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Proceedings Paper

A fluidic micro-actuator with an integrated inductive position sensor
Author(s): M. De Volder; J. Coosemans; F. Ceyssens; J. Peirs; R. Puers; D. Reynaerts
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Paper Abstract

An important technological barrier in the development of microrobotic systems is the lack of compact sensor-actuator systems. This paper presents a piston-cylinder fluidic microactuator with an integrated inductive position sensor. Such positioning systems offer great opportunities for all devices that need to control a large number of degrees of freedom in a restricted volume. The main advantage of fluidic actuators is their high force and power density at microscale. The outside diameter of the actuator developed in this research is 1.3 mm and the length is 15 mm. The stroke is 12 mm, and the actuation force is more than 0.4 N at a supply pressure of 550 kPa. The position sensor consists of two coils wound around the cylinder of the actuator. The measurement principle is based on the change in coupling factor between the coils as the piston moves in the actuator. The sensor is extremely small since one layer of 25 μm copper wire is sufficient to achieve an accuracy of 10 μm over the total stroke. Measurements showed that the actuator achieves a positioning accuracy of 20 μm in closed loop control.

Paper Details

Date Published: 20 December 2006
PDF: 8 pages
Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150F (20 December 2006); doi: 10.1117/12.695525
Show Author Affiliations
M. De Volder, Katholieke Univ. Leuven (Belgium)
J. Coosemans, Katholieke Univ. Leuven (Belgium)
F. Ceyssens, Katholieke Univ. Leuven (Belgium)
J. Peirs, Katholieke Univ. Leuven (Belgium)
R. Puers, Katholieke Univ. Leuven (Belgium)
D. Reynaerts, Katholieke Univ. Leuven (Belgium)


Published in SPIE Proceedings Vol. 6415:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David Victor Thiel, Editor(s)

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