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Proceedings Paper

Influence of artificial metallic defects size on the surface cleaning process
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Paper Abstract

Contamination by metallic particles has been known to reduce the laser damage threshold on high power laser optics. To simulate the presence of metallic particle on the Ligne d'Integration Laser optics, silica substrates were arti.cially polluted by square aluminum dots of 5 × 5 micron2 and 50 × 50 micron2, respectively. The metallic dot sites were irradiated by a Nd:YAG laser at 1064 nm with different fluences. The sites were analyzed by Nomarski microscopy, optic profilometry and photothermal microscopy. For both sizes of metallic dots, vaporization of metal can be observed. We study in this paper the dot size influence on the surface cleaning process and the effect of the pre-irradiation mode (1 shoot or several shots).

Paper Details

Date Published: 18 January 2007
PDF: 9 pages
Proc. SPIE 6403, Laser-Induced Damage in Optical Materials: 2006, 64030G (18 January 2007); doi: 10.1117/12.695454
Show Author Affiliations
J. Capoulade, Institut Fresnel, CNRS 6133, Univ. de Provence (France)
Univ. Paul Cézanne (France)
J. Y. Natoli, Institut Fresnel, CNRS 6133, Univ. de Provence (France)
Univ. Paul Cézanne (France)
S. Palmier, CEA/DAM/CESTA (France)
J. L. Rullier, CEA/DAM/CESTA (France)
I. Tovena, CEA/DAM/CESTA (France)


Published in SPIE Proceedings Vol. 6403:
Laser-Induced Damage in Optical Materials: 2006
Gregory J. Exarhos; Arthur H. Guenther; Keith L. Lewis; Detlev Ristau; M. J. Soileau; Christopher J. Stolz, Editor(s)

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