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Proceedings Paper

Optimization of MEMS fabrication process design by virtual experiments
Author(s): T. Schmidt; K. Hahn; T. Binder; J. Popp; A. Wagener; R. Brück
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Paper Abstract

Fabrication processes for MEMS are characterized by a variety of different process technologies and materials. Unlike in microelectronics the fabrication process is relevant to all design stages within the design flow. Discovering the correct combination of process steps, materials and process parameters usually requires a large number of experiments. This paper presents a new software system that supports the MEMS designers in managing their process knowledge and in performing virtual experiments using SILVACO TCAD tools.

Paper Details

Date Published: 20 December 2006
PDF: 8 pages
Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 64150R (20 December 2006); doi: 10.1117/12.695427
Show Author Affiliations
T. Schmidt, Univ. of Siegen (Germany)
K. Hahn, Univ. of Siegen (Germany)
T. Binder, Silvaco Technology Ctr. (United Kingdom)
J. Popp, Cavendish Kinetics (Netherlands)
A. Wagener, Univ. of Siegen (Germany)
R. Brück, Univ. of Siegen (Germany)


Published in SPIE Proceedings Vol. 6415:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David Victor Thiel, Editor(s)

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