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Proceedings Paper

Sub-pixel speckle displacement measurement by using optical vortex metrology
Author(s): Wei Wang; Tomoaki Yokozeki; Reika Ishijima; Atsushi Wada; Steen G. Hanson; Yoko Miyamoto; Mitsuo Takeda
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Paper Abstract

As an alternative to correlation-based techniques widely used in conventional speckle metrology, we propose a new technique that makes use of phase singularities in the complex analytic signal of a speckle pattern as indicators of local speckle displacements. The complex analytic signal is generated by vortex filtering the speckle pattern. Experimental results are presented that demonstrate the validity and the performance of the proposed optical vortex metrology with nano-scale resolution.

Paper Details

Date Published: 15 September 2006
PDF: 6 pages
Proc. SPIE 6341, Speckle06: Speckles, From Grains to Flowers, 634117 (15 September 2006); doi: 10.1117/12.695358
Show Author Affiliations
Wei Wang, The Univ. of Electro-Communications (Japan)
Tomoaki Yokozeki, The Univ. of Electro-Communications (Japan)
Reika Ishijima, The Univ. of Electro-Communications (Japan)
Atsushi Wada, The Univ. of Electro-Communications (Japan)
Steen G. Hanson, Risoe National Lab. (Denmark)
Yoko Miyamoto, The Univ. of Electro-Communications (Japan)
Mitsuo Takeda, The Univ. of Electro-Communications (Japan)


Published in SPIE Proceedings Vol. 6341:
Speckle06: Speckles, From Grains to Flowers
Pierre Slangen; Christine Cerruti, Editor(s)

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