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Proceedings Paper

Measuring part per million thin film absorption during deposition
Author(s): George Dubé; Arthur J. Braundmeier Jr.; Steve Chelli; Roland Juhala; Anthony Webb
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Paper Abstract

Waveguiding was used to measure the extinction coefficient of a thin film while it was being deposited in a vacuum chamber. Experimental results are presented and compared to calculations and measurements by other techniques.

Paper Details

Date Published: 18 January 2007
PDF: 13 pages
Proc. SPIE 6403, Laser-Induced Damage in Optical Materials: 2006, 64031F (18 January 2007); doi: 10.1117/12.695179
Show Author Affiliations
George Dubé, MetaStable Instruments, Inc. (United States)
Arthur J. Braundmeier Jr., Southern Illinois Univ. Edwardsville (United States)
Steve Chelli, Deposition Research Lab., Inc. (United States)
Roland Juhala, MetaStable Instruments, Inc. (United States)
Anthony Webb, MetaStable Instruments, Inc. (United States)

Published in SPIE Proceedings Vol. 6403:
Laser-Induced Damage in Optical Materials: 2006
Gregory J. Exarhos; Arthur H. Guenther; Keith L. Lewis; Detlev Ristau; M. J. Soileau; Christopher J. Stolz, Editor(s)

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