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Proceedings Paper

Three-dimension micro-nanofabrication with a femtosecond laser
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Paper Abstract

The light is the ultimate energy source for the life on the earth and also it is with the help of light that we see and understand the world surrounding us. The energy quanta are called photons. In addition to illuminating, imaging, and spectroscopy, a typical example of the recent uses of photons in our daily life is optical communication. A more and more important new role that photons are playing is manufacturing, particularly in three-dimensional micro-nanofabrication on the basis of nonlinear photon-matter interactions. This article reports our recent progress in this research direction: the challenge to the spatial resolution of fabrication, and the utilization of the technology on nanophotonic and micro-nanomechanical devices.

Paper Details

Date Published: 10 June 2006
PDF: 6 pages
Proc. SPIE 6344, Advanced Laser Technologies 2005, 634416 (10 June 2006); doi: 10.1117/12.694288
Show Author Affiliations
Hong-Bo Sun, Jilin Univ. (China)
Osaka Univ. (Japan)
Satoshi Kawata, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 6344:
Advanced Laser Technologies 2005
Ivan A. Shcherbakov; Kexin Xu; Qingyue Wang; Alexander V. Priezzhev; Vladimir I. Pustovoy, Editor(s)

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